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Atomic Layer Deposition for Semiconductors


On Sale Now! Free Shipping Included! Save 2% on the Atomic Layer Deposition for Semiconductors by Springer at EMS Linux. Hurry! Limited time offer. Offer valid only while supplies last. Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in


Product Description

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

Additional Information

Manufacturer:Springer
Publisher:Springer
Studio:Springer
EAN:9781489979438
Item Weight:0 pounds
Item Size:0.65 x 9.25 x 9.25 inches
Package Weight:0.94 pounds
Package Size:6.1 x 0.65 x 0.65 inches

Atomic Layer Deposition for Semiconductors by Springer

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Atomic Layer Deposition for Semiconductors

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